![A diagram listing MEMS records between 1950 and 2000. A diagram listing MEMS records between 1950 and 2000.](/courses/mechanical-engineering/2-674-micro-nano-engineering-laboratory-spring-2016/2-674s16.jpg)
History of Micro ElectroMechanical Systems. (Image by MIT OpenCourseWare.)
Instructor(s)
Prof. Sang-Gook Kim
Prof. Rohit Karnik
Prof. Jeehwan Kim
Dr. Benita Comeau
Daniel C Herrick
MIT Course Number
2.674 / 2.675
As Taught In
Spring 2016
Level
Undergraduate / Graduate
Course Description
Course Features
Course Description
This course encourages creative thinking through hands-on experience via building, observing and manipulating micro-and nano-scale structures. Students learn about underlying science and engineering principles and possible applications.